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Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: expanding the application range to Fizeau interferometers and electron microscopes
Anderson, Erik H.Volume:
50
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.3622485
Date:
September, 2011
File:
PDF, 1.54 MB
english, 2011