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SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Zone-plate array lithography (ZPAL): a new maskless approach
Carter, David J. D., Gil, Dario, Menon, Rajesh, Djomehri, Ihsan J., Smith, Henry I., Vladimirsky, YuliVolume:
3676
Year:
1999
Language:
english
DOI:
10.1117/12.351104
File:
PDF, 2.50 MB
english, 1999