SPIE Proceedings [SPIE International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013) - Singapore, Singapore (Tuesday 9 April 2013)] International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013) - Fabrication of multilevel spiral phase plates by focused ion beam milling
Pramitha, V., Quan, Chenggen, Qian, Kemao, Vijayakumar, A., Bhattacharya, Shanti, Asundi, AnandVolume:
8769
Year:
2013
Language:
english
DOI:
10.1117/12.2021061
File:
PDF, 881 KB
english, 2013