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Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes
Matsui, MiyakoVolume:
2
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.1585062
Date:
July, 2003
File:
PDF, 594 KB
english, 2003