SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] MEMS, MOEMS, and Micromachining III - Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices
Kusserow, T., Ferwana, S., Nakamura, T., Hayakawa, T., Dharmarasu, N., Vengatesan, B., Hillmer, H., Urey, HakanVolume:
6993
Year:
2008
Language:
english
DOI:
10.1117/12.781359
File:
PDF, 1.41 MB
english, 2008