Nature and Generation Mechanism of Butterfly-Type Intrinsic Gettering Centers in Oxygen-Free Silicon Crystals
Ueda, O., Nauka, K., Lagowski, J., Gatos, H.C.Volume:
10-12
Year:
1986
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.10-12.145
File:
PDF, 543 KB
1986