Molecular ruler lithography using sacrificial host...

Journal of Micro/Nanolithography MEMS and MOEMS 2006 / 10 Vol. 5; Iss. 4

Molecular ruler lithography using sacrificial host structures fabricated using electron beam lithography

Catchmark, Jeffrey M.
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Volume:
5
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2401140
Date:
October, 2006
File:
PDF, 365 KB
english, 2006
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