Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry targets
Sendelbach, MatthewVolume:
9
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3514707
Date:
October, 2010
File:
PDF, 1.19 MB
english, 2010