SPIE Proceedings [SPIE Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments - Beijing, China (Wednesday 8 November 2000)] Process Control and Inspection for Industry - Optical probe using differential confocal technique for surface profile
Wang, Fusheng, Tan, Jiubin, Zhao, Weiqian, Zhang, Shulian, Gao, WeiVolume:
4222
Year:
2000
Language:
english
DOI:
10.1117/12.403872
File:
PDF, 133 KB
english, 2000