Optical-Diffraction-Based Modulation Of Photoresist Profile...

Optical-Diffraction-Based Modulation Of Photoresist Profile For Microlithography Applications

Buraschi, Marco I.
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Volume:
28
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/12.7977016
Date:
June, 1989
File:
PDF, 8.57 MB
english, 1989
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