Wafer-Level Hall Measurement on SiC MOSFET

Yu, Liang Chun, Cheung, Kin P., Tilak, Vinayak, Dunne, Greg, Matocha, Kevin, Campbell, Jason, Suehle, John S., Sheng, Kuang

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Volume:

645-648

Language:

english

Journal:

Materials Science Forum

DOI:

10.4028/www.scientific.net/MSF.645-648.979

Date:

April, 2010

File:

PDF, 345 KB

english, 2010

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