Electrical and Thermal Properties of Platinum Thin Films Prepared by DC Magnetron Sputtering for Micro-Heater of Microsensor Applications after CMP Process
Kim, Nam Hoon, Na, Dong Myong, Ko, Pil Ju, Park, Jin Seong, Lee, Woo SunVolume:
124-126
Year:
2007
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.124-126.267
File:
PDF, 382 KB
english, 2007