Electrical and Thermal Properties of Platinum Thin Films...

Electrical and Thermal Properties of Platinum Thin Films Prepared by DC Magnetron Sputtering for Micro-Heater of Microsensor Applications after CMP Process

Kim, Nam Hoon, Na, Dong Myong, Ko, Pil Ju, Park, Jin Seong, Lee, Woo Sun
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
124-126
Year:
2007
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.124-126.267
File:
PDF, 382 KB
english, 2007
Conversion to is in progress
Conversion to is failed