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[IEEE 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Bologna, Italy (2015.1.26-2015.1.28)] EUROSOI-ULIS 2015: 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon - Study of high-temperature Smart Cut™: Application to thin films of single crystal silicon and silicon-on-sapphire films
Meyer, Raphael, Kononchuck, Oleg, Moriceau, Hubert, Lemiti, Mustapha, Bruel, MichelYear:
2015
Language:
english
DOI:
10.1109/ULIS.2015.7063800
File:
PDF, 457 KB
english, 2015