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Subwavelength interference lithography based on a unidirectional surface plasmon coupler
Yang, Xuefeng, Zhang, Shuxia, Zhang, Dao Hua, Wang, Yueke, Wang, JianVolume:
52
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.OE.52.8.086109
Date:
August, 2013
File:
PDF, 1.43 MB
english, 2013