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SPIE Proceedings [SPIE ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging - Beijing, China (Tuesday 25 June 2013)] International Symposium on Photoelectronic Detection and Imaging 2013: Low-Light-Level Technology and Applications - Influences of temperature and etching voltage on the surface morphology of photo-electro-chemical etching for silicon microchannel arrays
Zhang, Yao, Duanmu, Qingduo, Yu, Feng-yuan, Liang, Yong-zhao, Chai, Jin, Wang, Guo-zheng, Yang, Ji-kai, Chang, Benkang, Guo, HuiVolume:
8912
Year:
2013
Language:
english
DOI:
10.1117/12.2031882
File:
PDF, 313 KB
english, 2013