Structure and Optical Properties of Hydrogenated Silicon Films Prepared by Plasma Enhanced Chemical Vapour Deposition
Andreev, A.A., Andrianov, A.V., Averboukh, B.Y., Mavljanov, R., Aldabergenova, S.B., Albrecht, M., Strunk, Horst P.Volume:
51-52
Year:
1996
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.51-52.249
File:
PDF, 459 KB
1996