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Void-based photonic crystal mirror with high reflectivity and low dissipation for extreme-ultraviolet radiation
Lee, Yen-Min, Li, Jia-Han, Tsai, Kuen-YuVolume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.12.4.043005
Date:
December, 2013
File:
PDF, 3.95 MB
english, 2013