Confocal principle for macro- and microscopic surface and...

Confocal principle for macro- and microscopic surface and defect analysis

Tiziani, Hans J.
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Volume:
39
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.602332
Date:
January, 2000
File:
PDF, 1.06 MB
english, 2000
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