Lossless circuit layout image compression algorithm for...

Journal of Micro/Nanolithography MEMS and MOEMS 2011 / 10 Vol. 10; Iss. 4

Lossless circuit layout image compression algorithm for maskless direct write lithography systems

Savari, Serap A.
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Volume:
10
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3644620
Date:
October, 2011
File:
PDF, 1.60 MB
english, 2011
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