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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 17 August 2014)] Advances in X-Ray/EUV Optics and Components IX - APS deposition facility upgrades and future plans
Morawe, Christian, Khounsary, Ali M., Goto, Shunji, Conley, Ray, Shi, Bing, Erdmann, Mark, Izzo, Scott, Assoufid, Lahsen, Goetze, Kurt, Mooney, Tim, Lauer, KennethVolume:
9207
Year:
2014
Language:
english
DOI:
10.1117/12.2062427
File:
PDF, 6.68 MB
english, 2014