Effects of oxidants on the removal of tungsten in CMP...

Effects of oxidants on the removal of tungsten in CMP process

Geonja Lim, Jong-Ho Lee, Joosun Kim, Hae-Weon Lee, Sang-Hoon Hyun
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Volume:
257
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.wear.2004.02.007
File:
PDF, 319 KB
english, 2004
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