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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Advances in X-Ray/EUV Optics and Components VIII - Suppression of long wavelength reflection from extreme-UV multilayer optics
Huang, Q., van den Boogaard, A. J. R., van de Kruijs, R., Zoethout, E., Medvedev, V. V., Louis, E., Bijkerk, F., Khounsary, Ali, Goto, Shunji, Morawe, ChristianVolume:
8848
Year:
2013
Language:
english
DOI:
10.1117/12.2023889
File:
PDF, 299 KB
english, 2013