Formation of Magnesium Oxide Thin Films by Reactive...

Key Engineering Materials 1999 Vol. 159-160

Formation of Magnesium Oxide Thin Films by Reactive Sputtering

Irie, K., Ishibashi, Shoji, Nishimura, Toshiyuki, Fujii, Hidetoshi, Muraji, S., Shima, Y., Hasuyama, H.
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Volume:
159-160
Year:
1999
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.159-160.299
File:
PDF, 408 KB
1999
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