SPIE Proceedings [SPIE SPIE Scanning Microscopy - Monterey,...

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SPIE Proceedings [SPIE SPIE Scanning Microscopy - Monterey, CA (Monday 4 May 2009)] Scanning Microscopy 2009 - XHR SEM: enabling extreme high resolution scanning electron microscopy

Young, Richard, Postek, Michael T., Newbury, Dale E., Henstra, Sander, Chmelik, Jarda, Platek, S. Frank, Joy, David C., Dingle, Trevor, Mangnus, Albert, van Veen, Gerard, Gestmann, Ingo
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Volume:
7378
Year:
2009
Language:
english
DOI:
10.1117/12.824749
File:
PDF, 2.12 MB
english, 2009
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