[IEEE 2014 24th International Crimean Conference "Microwave & Telecommunication Technology" (CriMiCo) - Sevastopol, Ukraine (2014.9.7-2014.9.13)] 2014 24th International Crimean Conference Microwave & Telecommunication Technology - Influence of residual gas pressure and ion implantation on the properties of nitride high-entropy alloys (TiZrAlYNb)N

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