Investigation of high-pressure micro jet technology as an...

Wear 2006 Vol. 260; Iss. 11-12

Investigation of high-pressure micro jet technology as an alternative to diamond disc conditioning in ILD CMP

Darren DeNardis, Yoshiyuki Seike, Mineo Takaoka, Keiji Miyachi, Ara Philipossian
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Volume:
260
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.wear.2005.08.002
File:
PDF, 486 KB
english, 2006
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