Influence of the Oxidation Temperature and Atmosphere on the Reliability of Thick Gate Oxides on the 4H-SiC C(000-1) Face
Grieb, Michael, Peters, Dethard, Bauer, Anton J., Friedrichs, Peter, Ryssel, HeinerVolume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.597
File:
PDF, 1.06 MB
english, 2009