Investigation of Aluminum Incorporation in 4H-SiC Epitaxial Layers
Arvinte, Roxana, Zielinski, Marcin, Chassagne, Thierry, Portail, Marc, Michon, Adrien, Kwasnicki, Pawel, Juillaguet, Sandrine, Peyre, HervéVolume:
806
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.806.45
Date:
October, 2014
File:
PDF, 732 KB
english, 2014