Research on HfSiN Diffusion Barrier Thin Film for...

Materials Science Forum 2014 / 12 Vol. 809-810

Research on HfSiN Diffusion Barrier Thin Film for Micro-Nanoscale ULSI-Cu Metallization

Liu, Xue Mei, Chen, Xiu Hua, Han, Yong Qiang, Ma, Wen Hui, He, Jia Li, Xiao, Yong Yin, Li, Jiao
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Volume:
809-810
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.809-810.583
Date:
December, 2014
File:
PDF, 426 KB
english, 2014
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