Application of a divergent laser beam in a grating...

Application of a divergent laser beam in a grating interferometer for high-resolution displacement measurements

Dobosz, Marek
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Volume:
33
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/12.160893
Date:
March, 1994
File:
PDF, 236 KB
english, 1994
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