Frequency dependent dielectric properties of PMMA deposited...

Materials Science in Semiconductor Processing 2015 / 10 Vol. 38

Frequency dependent dielectric properties of PMMA deposited on p-type silicon

Selçuk, A.B., Bilge Ocak, S., Aras, G., Orhan, E.
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Volume:
38
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.04.019
Date:
October, 2015
File:
PDF, 1.03 MB
english, 2015
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