![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE International Conference on Micro- and Nano-Electronics 2009 - Zvenigorod, Russian Federation (Monday 5 October 2009)] International Conference on Micro- and Nano-Electronics 2009 - Plasma parameters and active particles kinetics in HBr dc glow discharges
Smirnov, A., Efremov, A., Svettsov, V., Islyaykin, A., Valiev, Kamil A., Orlikovsky, Alexander A.Volume:
7521
Year:
2010
Language:
english
DOI:
10.1117/12.853343
File:
PDF, 267 KB
english, 2010