SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Metrology, Inspection, and Process Control for Microlithography XXIX - Transient tip-sample interactions in high-speed AFM imaging of 3D nano structures
Cain, Jason P., Sanchez, Martha I., Keyvani, Aliasghar, Sadeghian, Hamed, Goosen, Hans, van Keulen, FredVolume:
9424
Year:
2015
Language:
english
DOI:
10.1117/12.2185848
File:
PDF, 531 KB
english, 2015