Effects of Metallic Contaminants on the Electrical...

Electrochemical and Solid-State Letters 2005 Vol. 8; Iss. 8

Effects of Metallic Contaminants on the Electrical Characteristics of Ultrathin Gate Oxides

Pan, Tung-Ming, Ko, Fu-Hsiang, Chao, Tien-Sheng, Chen, Chieh-Chuang, Chang-Liao, Kuei-Shu
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Volume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1945367
File:
PDF, 150 KB
english, 2005
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