MOEMS tunable microlens made of aluminum nitride membranes

Journal of Micro/Nanolithography MEMS and MOEMS 2013 / 06 Vol. 12; Iss. 2

MOEMS tunable microlens made of aluminum nitride membranes

Leopold, Steffen, Polster, Tobias, Paetz, Daniel, Knoebber, Fabian, Ambacher, Oliver, Sinzinger, Stefan, Hoffmann, Martin
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Volume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.12.2.023012
Date:
June, 2013
File:
PDF, 2.56 MB
english, 2013
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