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Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements
Lin, Wei Min, Ohmori, Hitoshi, Suzuki, T., Uehara, Yoshihiro, Morita, ShinyaVolume:
291-292
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.291-292.365
File:
PDF, 582 KB
english, 2005