Nondestructive and Contactless Monitoring Technique of Si...

Japanese Journal of Applied Physics 2001 / 4 Vol. 40; Iss. Part 1, No

Nondestructive and Contactless Monitoring Technique of Si Surface Stress by Photoreflectance

Sohgawa, Masayuki, Agata, Masashi, Kanashima, Takeshi, Yamashita, Kaoru, Eriguchi, Koji, Fujimoto, Akira, Okuyama, Masanori
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.2844
Date:
April, 2001
File:
PDF, 131 KB
english, 2001
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