A Comparative Analysis of Structural Defect Formation in...

Solid State Phenomena 2008 Vol. 131-133

A Comparative Analysis of Structural Defect Formation in Si+ Implanted and then Plasma Hydrogenated and in H+ Implanted Crystalline Silicon

Nordmark, Heidi, Ulyashin, Alexander G., Walmsley, John Charles, Holmestad, Randi
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Volume:
131-133
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.131-133.309
File:
PDF, 3.54 MB
english, 2008
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