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SPIE Proceedings [SPIE Symposium on Integrated Optoelectronic Devices - San Jose, CA (Friday 18 January 2002)] Silicon-based and Hybrid Optoelectronics IV - MOEMS based on the combination of moving planar waveguides and mechanical structures
Ollier, Eric, Labeye, Pierre, Petroz, Karine, Robbins, David J., Jabbour, Ghassan E.Volume:
4654
Year:
2002
Language:
english
DOI:
10.1117/12.463850
File:
PDF, 286 KB
english, 2002