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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI - Usage induced changes to surface topography and material properties in polysilicon MEMS electrothermal structures
Oak, Sahil, Ramachandran, Gautham, Dallas, Tim, García-Blanco, Sonia M., Ramesham, RajeshuniVolume:
8250
Year:
2012
Language:
english
DOI:
10.1117/12.909180
File:
PDF, 1.16 MB
english, 2012