SPIE Proceedings [SPIE Second International Conference on Experimental Mechanics - Singapore, Singapore (Wednesday 29 November 2000)] Second International Conference on Experimental Mechanics - New instrument for measuring mechanical compliance of microsystems
Ju, Bingfeng, Liu, Kuo Kang, Ling, Shih-Fu, Chau, Fook S., Quan, ChenggenVolume:
4317
Year:
2001
Language:
english
DOI:
10.1117/12.429581
File:
PDF, 1.58 MB
english, 2001