Influence of Heat Treatment on the Structure of W-Si-N...

Key Engineering Materials 2002 Vol. 230-232

Influence of Heat Treatment on the Structure of W-Si-N Sputtered Films

Ferreira, Luís Manuel Silva, Louro, C., Cavaleiro, Albano, Trindade, Bruno
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Volume:
230-232
Year:
2002
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.230-232.640
File:
PDF, 555 KB
english, 2002
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