The Removal Kinetis of Boron and Phosphorus Atoms from...

Materials Science Forum 1989 Vol. 38-41

The Removal Kinetis of Boron and Phosphorus Atoms from Substitutional Site in Si Caused by Interaction with Radiation Defects

Akhmetov, V.D., Bolotov, V.V., Kamayev, G.N., Smirnov, L.S.
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Volume:
38-41
Year:
1989
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.38-41.1239
File:
PDF, 336 KB
1989
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