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Diffusion of Sb in Si1-xGex-Alloy Layers
Kringhøj, P., Nylandsted-Larsen, ArneVolume:
143-147
Year:
1997
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.143-147.1125
File:
PDF, 426 KB
1997