SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII - Electrothermally tunable MEMS filters
Shea, Herbert R., Ramesham, Rajeshuni, Prasad, A. V. S. S., K. P., Venkatesh, Bhat, Navakanta, Pratap, RudraVolume:
8975
Year:
2014
Language:
english
DOI:
10.1117/12.2038822
File:
PDF, 971 KB
english, 2014