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Ultrasonic cleaning optimization research for ultrasmooth optical substrate with artificial micron/submicron silica spheres
Ding, Tao, Xie, Yujiang, Shen, Zhenxiang, Cheng, Xinbing, Wang, ZhanshanVolume:
53
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.oe.53.12.122514
Date:
October, 2014
File:
PDF, 2.07 MB
english, 2014