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Improved secondary electron extraction efficiency model for accurate measurement of narrow-space patterns using model-based library matching
Shishido, ChieVolume:
10
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3664410
Date:
October, 2011
File:
PDF, 3.44 MB
english, 2011