Statics and Dynamics of MEMS Arches Under Axial Forces

Journal of Vibration Acoustics Stress and Reliability in Design 2013 / 02 Vol. 135; Iss. 2

Statics and Dynamics of MEMS Arches Under Axial Forces

Alkharabsheh, Sami A., Younis, Mohammad I.
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Volume:
135
Language:
english
Journal:
Journal of Vibration and Acoustics
DOI:
10.1115/1.4023055
Date:
February, 2013
File:
PDF, 1.56 MB
english, 2013
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