![](/img/cover-not-exists.png)
Fracture Toughness Measurement of a Micro-Sized Single Crystal Silicon
Koyama, Satoru, Takashima, Kazuki, Higo, YakichiVolume:
297-300
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.297-300.292
File:
PDF, 661 KB
english, 2005