Dose Influence on Physical and Electrical Properties of...

Materials Science Forum 2012 / 1 Vol. 711

Dose Influence on Physical and Electrical Properties of Nitrogen Implantation in 3C-SiC on Si

Song, Xi, Biscarrat, Jérôme, Bazin, Anne Elisabeth, Michaud, Jean François, Cayrel, Frédéric, Zielinski, Marcin, Chassagne, Thierry, Portail, Marc, Collard, Emmanuel, Alquier, Daniel
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Volume:
711
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.711.154
Date:
January, 2012
File:
PDF, 687 KB
english, 2012
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